SUZUKI, Masato |
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Faculty, Department/Institute
- Faculty of Engineering Science Department of Mechanical Engineering
Academic status (qualification)
- Professor Apr. 1,2022
Academic Degrees
- Hiroshima University
Research fields
Research fields | keyword |
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Micro-/Nano-Scale cutting | ; |
Research topics
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Research Topics Overview |
Intellectual Property Rights
- (Pending)
- application number:2012-116412 (May 22,2012)
- (Pending)
- application number:特願2012-119865 (May 25,2012)
- (Pending)
- application number:2012-231755 (Oct. 19,2012)
Research Publications
No. | Type of publication | Date of publication (Date of presentation) | Title | Type of research result | Jointly authored or single authored | Publisher and journal name | Volume number |
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1 | Papers1 | 2016/6~2016,06,00,,, | Human Detection by Fourier Descriptors and Fuzzy Color Histograms with Fuzzy c-Means Method | Academic Journal | Co-authored | Vol. 28, No. 4, pp. 491-499 | |
2 | Papers1 | 2009/9~2009,09,,,, | Fabrication of Micro Accelerometer Using Screen Printed BaTiO3 Film on a Ceramic Substrate and Its Characterization | Academic Journal | Co-author | IEEJ Transactions on Sensors and Micromachines | Vol.129, No.9, pp.295-300 |
3 | Papers1 | 2008/4~2008,04,,,, | Imprint Property of Optical Mach-Zehnder Interferometers Using (Ba,Sr)TiO3 Sputter- Deposited at 450ºC | Academic Journal | Co-author | Japanese Jounal of Applied Physics | Vol.47, No.4B, pp.2897-2901 |
PapersHuman Detection by Fourier Descriptors and Fuzzy Color Histograms with Fuzzy c-Means MethodIn refereedAcademic JournalCo-authoredAKIMOTO,Shohei;TAKAHASHI,Tomokazu;SUZUKI,Masato;ARAI,Yasuhiro;AOYAGI,seijiMobile robot;Home Robot;Outdoor autonomous navigation for mobile robot;Environment recognitionVol. 28, No. 4, pp. 491-4992016/6~10.20965/jrm.2016.p04910915-3942
Academic presentationSUZUKI,Masato;;;;2013/3/13~2013/3/15
Academic presentationSUZUKI,Masato;;;;;;2013/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;;;;2013/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;;2013/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;;;;;2013/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;;2013/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;;2013/1/29~2013/1/30
International academic conferenceSUZUKI,Masato;;;;;2013/1~
International academic conferenceSUZUKI,Masato;;;;;2012/11/5~2012/11/7
SUZUKI,Masato;;;;;;2012/10/26~
Academic presentationSUZUKI,Masato;;;;;;2012/10/22~2012/10/24
Academic presentationSUZUKI,Masato;;;;;;2012/10/22~2012/10/24
Academic presentationSUZUKI,Masato;;;;2012/10/22~2012/10/24
Academic presentationSUZUKI,Masato;;;;;;2012/10/22~2012/10/24
International academic conferenceSUZUKI,Masato;;;;;;;;2012/10/7~2012/10/12
Academic presentationSUZUKI,Masato;;;;2012/9/17~2012/9/20
Academic presentationSUZUKI,Masato;;;;2012/9/14~2012/9/16
Academic presentationSUZUKI,Masato;;;;2012/9/14~2012/9/16
Academic presentationSUZUKI,Masato;;;;2012/8/6~2012/8/8
Academic presentationSUZUKI,Masato;;;;;;2012/6/15~
Academic presentationSUZUKI,Masato;;;;;;2012/6/15~
Academic presentationSUZUKI,Masato;;;;2012/6~
Academic presentationSUZUKI,Masato;;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;;;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;2012/5/27~2012/5/29
Academic presentationSUZUKI,Masato;;;;2012/5/27~2012/5/29
PapersUnrefereedSUZUKI,Masato;;;;;;;;;2012/4~
PapersUnrefereedSUZUKI,Masato;;;;;;2012/4~
Academic presentationSUZUKI,Masato;;;;;2012/3/14~2012/3/16
Academic presentationSUZUKI,Masato;;;;2012/3/14~2012/3/15
PapersIn refereedCo-authorSUZUKI,Masato;;;;2012/3~
PapersIn refereedCo-authorSUZUKI,Masato;;;2012/3~
SUZUKI,Masato;;;;;;;;;;;;2012/3~
Academic presentationSUZUKI,Masato;;;;2012/1/29~2013/1/30
Academic presentationSUZUKI,Masato;;;2012/1/23~2012/1/24
Academic presentationSUZUKI,Masato;;;;2012/1/23~2012/1/24
Academic presentationSUZUKI,Masato;;;;;;2012/1/23~2012/1/24
PapersIn refereedCo-authorSUZUKI,Masato;;;;;2012/1~
International academic conferenceSUZUKI,Masato;;;;;;;2012/1~
International academic conferenceSUZUKI,Masato;;;;;2012/1~
PapersIn refereedCo-authorSUZUKI,Masato;;;;;2011/12/20~
International academic conferenceSUZUKI,Masato;;;;;;2011/11/15~2011/11/18
PapersIn refereedCo-authorSUZUKI,Masato;;;;;;;2011/11~
International academic conferenceSUZUKI,Masato;;;;;;2011/9/28~2011/9/30
Academic presentationSUZUKI,Masato;;;;;;;;2011/9/26~2011/9/27
Academic presentationSUZUKI,Masato;;;;;;;;;;2011/9/26~2011/9/27
Academic presentationSUZUKI,Masato;;;;2011/9/26~2011/9/27
Academic presentationSUZUKI,Masato;;;;2011/9/20~2011/9/22
Academic presentationSUZUKI,Masato;;;;;;2011/9/7~2011/9/9
Academic presentationSUZUKI,Masato;;;;2011/9/7~2011/9/9
Academic presentationSUZUKI,Masato;;;;2011/9/7~2011/9/9
PapersIn refereedCo-authorSUZUKI,Masato;;;;;;2011/9~
PapersIn refereedCo-authorSUZUKI,Masato;;;;2011/8/25~
Academic presentationSUZUKI,Masato;;;;2011/7/20~2011/7/22
International academic conferenceSUZUKI,Masato;;;;;;;;;2011/7/6~2011/7/8
SUZUKI,Masato;;2011/7~
SUZUKI,Masato;;;;2011/7~
SUZUKI,Masato;;;2011/7~
International academic conferenceSUZUKI,Masato;;;;;;;;2011/6/5~2011/6/9
International academic conferenceSUZUKI,Masato;;;;;;;;;;2011/6/5~2011/6/9
International academic conferenceSUZUKI,Masato;;;;2011/6/5~2011/6/9
Academic presentationSUZUKI,Masato;;;;2011/5/26~2011/5/28
Academic presentationSUZUKI,Masato;;;;2011/5/26~2011/5/28
Academic presentationSUZUKI,Masato;;;;2011/5/26~2011/5/28
PapersIn refereedCo-authorSUZUKI,Masato;;;;;;2011/5~
PapersIn refereedAcademic JournalCo-authorSUZUKI,Masato;IEEJj Transactions on Sensors and MicromachinesVol.129, No.9, , pp.301-3062009/9~A new concept of inertial force sensor, which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon, is proposed in this paper. In this sensor, one waveguide of branched two waveguides in the MZI have floating beam structure (air-bridge type). Additionally, the cantilever supporting a proof mass intersects with the floating optical waveguide. When the inertial force is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated.
An optical optimization of the inertial force sensor is carried out by using a simulation, of which a solver is 2-dimentional beam-propagation method (2D BPM). As a result, optical loss at the intersection of the floating waveguide and the cantilever is improved by using multi-mode interference (MMI) waveguide as an intersected waveguide.
Structure of the sensor is also optimized by a simulation which uses 3-dimentical finite element method (3D FEM). Especially, deflection at the intersection of the sensor is focused on. As results of the simulation, it is found that the sensitivity of the sensor can be controlled by changing in the width and length of the cantilever. Additionally, it is also found that the using of MMI waveguide as interconnecting waveguide dose not decay the sensitivity of sensor. As the results of above simulation, it is expected that an inertial force sensor, which have both high sensitivity and good mechanical strength properties, can be fabricated by using the structure in which multiple cantilevers crosses with the MMI waveguide.
PapersFabrication of Micro Accelerometer Using Screen Printed BaTiO3 Film on a Ceramic Substrate and Its CharacterizationIn refereedAcademic JournalCo-authorSUZUKI,Masato;IEEJ Transactions on Sensors and MicromachinesVol.129, No.9, pp.295-3002009/9~The concept of MEMS sensors directly fabricated on a ceramic substrate, which can be used for a package of end product, was proposed. As one of such sensors, a micro accelerometer utilizing a fringe capacitance formed in a ferroelectric material was focused on. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film on a ceramic alumina substrate was herein employed. A screen-printing method can save the amount of raw material of the film, because a comparatively thick film can be deposited only on a specified area. Moreover, BTO does not contain harmful lead material. The optimal condition for fabricating a BTO film on an alumina substrate with minimum unwanted surface defects was experimentally searched. The number of defects was decreased by employing a metal barrier of Pt layer underneath BTO, and by setting the annealing temperature for crystallization to a higher value of 1,400ºC. A comparatively high relative dielectric constant of 926 was achieved. An accelerometer using a BTO film was practically fabricated. The sensitivity of it was estimated as 0.1 pF/g, which is degraded a little compare with the previously developed accelerometer using a PZT plate; however, the order is same.
PapersImprint Property of Optical Mach-Zehnder Interferometers Using (Ba,Sr)TiO3 Sputter- Deposited at 450ºCIn refereedAcademic JournalCo-authorSUZUKI,Masato;Japanese Jounal of Applied PhysicsVol.47, No.4B, pp.2897-29012008/4~We have evaluated a change in optical modulation of Mach-Zehnder interferometers (MZIs) after bias temperature (BT) stress. Phase shifters of MZIs are made of (Ba,Sr)TiO3 (BST) films, which are sputter-deposited at 450deg., which is an acceptable temperature after the metallization process. As a result, the optical modulation of MZIs is enhanced by BT stress. This effect is regarded as an “optical imprint effect” because this effect is similar to the imprint effect of polarization properties of ferroelectric materials by BT stress. It is found that the optical imprint effect of BST MZIs becomes maximum when the temperature of BT stress is 75 deg. The reason for this phenomenon is considered to be the lowering of the resistivity of the BST layer when stress temperature is higher than 75deg. The imprint effect decreases with time after removing the bias stress, and the decay speed in the imprint effect increases with substrate temperature. We propose a model of the optical imprint effect in which the polarized domains are aligned by BT stress, and then the electro-optic (EO) effect is enhanced.
Courses Taught
- Experiments of Mechanical Engineering
- Thesis Projects I
- Thesis Projects II
- Electrical Engineering
- Electronics Engineering
- Preliminary Thesis Project
- Introduction to Mechanical Engineering (Practice)
- Information Processing Practice II
- SeminarI(Mechanical Engineering)
- SeminarII(Mechanical Engineering)
- SeminarIII(Mechanical Engineering)
- SeminarIV(Mechanical Engineering)
- Advanced Lectures on Nanodevice Fabrication
- Personal Information
- Research Activities
- Research Activities
- Community Service
- Courses Taught